SEM View of Coupled Oscillators Made of Low Stress Silicon Nitride. 300x Cornell Nanoscale Facility and Department of Applied Physics, USA

Array of low stress silicon nitride coupled oscillators with gold actuation leads. 1,100x Cornell Nanoscale Facility and Department of Applied Physics, USA

Thermal Actuated Actuators Universite Catholique de Louvain

B Lock & Stepper University of California at Los Angeles